绿色环保化学机械抛光液的研究进展

图 3  (a) 利用臭氧气体发生器产生的含气泡的强化浆料对SiC衬底的CMP方法示意图[48]; (b) 基于电芬顿反应的6H-SiC单晶增强CMP法原理图[49]; (c) 氯化钠水溶液阳极氧化装置示意图[50]; (d) 光化学辅助CMP示意图[51]

Fig. 3.  (a) Illustration of proposed CMP method of SiC substrate by enhanced slurry containing bubbles enclosing ozone gas generated by ozone gas generator[48]; (b) schematic diagram of enhanced CMP method for single-crystal 6H-SiC based on electro-Fenton reaction[49]; (c) schematic diagram of anodic oxidation setup with sodium chloride aqueous solution[50]; (d) schematic diagram of photochemically combined CMP process[51].