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APPLIED MICROSWISS - Replication tools in Nickel,Silicon and PDMS,Nickel-components,Services,LiGA-technique,microtechnology,nanotechology,replicationChoose your language: Deutsch English Home About us Values Company Vision MissionProducts & Innovations Manufacturing basics Replication tools Roller embossing Shims Hot-embossing Stamps Injection molding Inserts Nickel components High definition Nozzle plates Watch components Endoscopic tools Stencil masksServices & Engineering I. Photoresist coating II. UV-Lithography III. PVD-coating IV. Anti-sticking coatingNews & Downloads Contact Services and Engineering: IV Antisticking-coating service:Antisticking layers (ASL) are available for replication tools as well as for lithography-masks. ASL are a very useful added functionality to our products when easy mold-separation is essential for your replication process. We do also offer anti-sticking coatings for lithography-masks. An additional ASL can become the best measure to reduced sticking forces between mask and resist-coating. This is very helpful way to avoid mask-contamination due to resist-voids, thus increasing "operating-hours-between-cleaning". This is particularly crucial with thick resists (e.g SU-8) and -inherently- long exposure durations. Our ASL coatings still allow the use of organic solvents (Aceton, IPA, etc.) for intermediate mask-cleaning. Antisticking-coatings are Si-F based and can be refreshed and thereby substantially extending mask-life. 1: Antisticking layer (ASL) on 5inch Mask to avoid defects during hard-contact exposure. 2: Antisticking layer (ASL) on 5inch Mask to avoid defects during hard-contact exposure. 3: Antisticking layer (ASL) on Nickel-mold for PDMS casting. 4: Antisticking layer (ASL) on Nickel-mold for PDMS casting. 5: Antisticking layer (ASL) on Nickel hot-embossing stamp. 6: Wetting-angle measuring procedure. 7: Wetting-angle measuring procedure. 8: Measuring protocol: wetting-angle = 113.2° Contact us for more information Specifications:Type of the ASL-coating: Fluoro-Silane. Additional SiO2 base coating may be required (Thickness = 20 - 50nm) Coating available for these substrate materials: Glass (e.g.Sodalime or Quarz for lithography-masks) Silicon, Nickel, Steel Substrate formats: Round substrates: ø100 - ø300mm Square substrates: 4", 5", 6", 7", 9" Replication tools: any shape of shims, stamps or inserts Process flexibility: Other substrate-formats or substrate-material on request. Case study 1: Antisticking coating on lithographic mask Adding an F-Si based ASL on a lithography mask:1. Customer sends pattern-design (CAD-file, sketch,...) 2. applied microSWISS takes care of maskset-manufacturing 3. SiO2 coating (thickness = 50nm) onto mask 4. CVD processing to apply Antisticking coating 5. Packaging processed mask in original container 6. Shipping with appropriate remarks for handling, cleaning and storage Case study 2: Antisticking coating on Nickel hot-embossing stamp Adding an F-Si based ASL on a Nickel hot-embossing stamp:1. Customer sends pattern-design (CAD-file, sketch,...) for stamp 2. applied microSWISS to manufactures the hot-embossing stamp 3. SiO2 coating (thickness = 50nm) onto mask 4. CVD processing to apply Antisticking coating 5. Packaging processed stamp in appropriate container 6. Shipping with appropriate remarks for handling, cleaning and storage applied microSWISS Neugruet 45 LI-9496 Balzers Imprint Privacy policy Sitemap
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