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激光与光电子学进展, 2004, 41 (3): 42, 网络出版: 2006-06-12 飞秒激光超精细“冷”加工技术及其应用 (I) 下载： 761次Femtosecond Laser “Cold” Micro-Machining and Its Advanced ApplicationsGet PDFFull Text图表MetricsMore 杨建军
作者单位 深圳大学工程技术学院, 深圳 518060
飞秒激光 微加工 应用 femtosecond laser pulses non-thermal micro-machining application 摘要飞秒激光的超快速时间和超高峰值特性将其能量全部、快速、准确地集中在限定的作用区域,实现对几乎所有材料的非热熔性冷处理,获得传统激光加工无法比拟的高精度、低损伤等独特优势。通过与长脉冲作用情形的比较,详细阐述飞秒激光作用的基本原理及其本质特征。介绍了目前应用飞秒激光这一独特优势在材料的超微细加工和结构处理、光子器件新型制作、高密度数据全新存储、医疗和生物工程等方面取得的最新进展,揭示了飞秒激光在工业加工、微电子、光通讯、光信息和生命科学等高技术领域有着非常广泛的应用前景。 AbstractFemtosecond laser pulses with ultrashort time duration and ultrahigh peak power can focus their total energy into a very limited volume very quickly and very accurately, which realizes the non-thermal micro-processing of almost any materials. It has high accuracy, low damages and other advantages conventional laser machining could not compare with. This paper describes these characteristics by comparing the basic principle and mechanism for the interaction between femtosecond laser pulses and the long pulses. Also we give some advanced applications of femtosecond laser pulses in micro-machining, structural processing, photonic devices manufacture, 3-D data storage, medical and bio-engineering, which shows its bright future in industry, micro-electronics, optical communication, optical information and life sciences. PDF全文 杨建军. 飞秒激光超精细“冷”加工技术及其应用 (I)[J]. 激光与光电子学进展, 2004, 41(3): 42. 杨建军. Femtosecond Laser “Cold” Micro-Machining and Its Advanced Applications[J]. Laser & Optoelectronics Progress, 2004, 41(3): 42.
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